CT 300 Datasheet0 pages

LOGO
P RODUCT
Fast, precise and accurATe
measurement on small and
large samples
Large 315 mm x 315 mm
scanning area
User friendly concept
Sophisticated analysis and
automation software
Geometry of LED devices
Flatness of a silicon wafer
Overview
The cyberSCAN CT 300 is a non-contact profilometer
with a 315 mm x-, y-motion system. It can scan up
to 12” wafers or other large substrates and parts.
It is ideal for measuring flatness with submicron
accuracy over the complete 315 mm travel. Using
a chromatic white light sensor and a data rate of
up to 4 kHz the inspection time is minimized. The
sensors are available with a z-resolution down to
3 nm and a measurement range up to 25 mm. With
our multi-sensor technology several sensor heads
can be mounted simultaneously including infrared
interferometers for measuring wafer thickness.
Applications
Warpage of electronic componets
Typical applications are the analysis and quality
control of printing processes, such as for PV solar
cells, incoming inspection of substrate materials,
thick-film measurement on a variety of substrates,
volume measurement of paste depots, epoxy-film,
dots or other printed and dispensed features.
Geometry and position measurement of highly
contoured objects like solder bumps, microlenses, and MEMS devices, as well as flatness and
coplanarity analysis are other popular applications.
Since the CT 300 maintains high accuracy across the
entire travel, larger parts such as wafers, gaskets, or
glass lenses are inspected fast and precisly.
t Printed products, systems or devices
t Device packaging
t Printed circuits
t MEMS
t Fuel cell elements
t Lenses, gaskets, larger mechanical parts
t Soft and transparent materials or coatings
t Medical devices
t Wafer Thickness, Bow, TTV
Software
The proprietary cyberTECHNOLOGIES, Windowsbased software package SCAN SUITE combines
system control, data collection and data analysis in
a user friendly interface. Comprehensive profile,
3D and roughness analyses conforming to DIN ISO
are included. The software can handle up to 10.000
x 10.000 data points in one scan.
An outstanding feature is the ASCAN Software:
t Automation of measurement routines
t Easy programming using tasks and templates
t Offset and fiducial correction
t Built-in SPC Charts with reporting function
t Flexible, user defined data output format
t Barcode or user field input
t Step & Repeat function
Technology
t Fast and accurate magnetic linear stage
t Measurement speed: 2 kHz
(4 kHz and 14 kHz optional)
t 315 mm travel in x- and y-direction, lateral tt
resolution 0.05 µm, optional motorized z-axis
t 2D profiles and 3D topographical maps
t Large scanning area, up to the maximum travel t
of 315 mm at maximum x-, y-, z-resolution
t Laser confocal and chromatic white light sensors
t Resolution down to 3 nm, measurement range t
up to 25 mm
t On-axis camera or high resolution off-axis camera
SLOGAN
BECAUSE ACCURACY MATTERS