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LOGO

P RODUCT

3D SCANNING SYSTEM
CONFOCAL WHITE LIGHT SENSOR
SOPHISTICATED AUTOMATION
AND ANALYSIS SOFTWARE

Coplanarity of BGA components

3D metallization measurement on
solar cells

Overview

The cyberSCAN VANTAGE 2 is a non-contact
surface metrology system. It combines high
resolution confocal sensor technology with a
x- and y-translation stage. The system can measure
large areas up to 200 mm with maximum x-,
y-, z-resolution. All electronic components are
integrated into a robust housing, no cables or
external controllers are required. The system
is connected with a single USB cable to PC or
workstation. The proprietary and user friendly
cyberTECHNOLOGIES Software offers sophisticated
surface metrology analyses and automated
measurement routines.

Applications

Thick-film height on hybrid circuits

Typical applications for the cyberSCAN VANTAGE
2 are the analysis and quality control of printing
processes, such as thickfilm measurement on
ceramic or any other substrates, PV solar cells,
volume measurement of paste depots, epoxy-film,
dots or other printed and dispensed features.
Geometry and position measurement of highly
contoured objects like solder bumps, MEMS
devices, as well as flatness and coplanarity analysis
are other popular applications.
t Printed products, systems or devices
t Device packaging, BGA bump height
tMEMS
t Solar and fuel cell elements
t Soft and transparent materials or coatings
t Medical devices
t Ceramics and plastics

Software

The proprietary cyberTECHNOLOGIES Software
package SCAN SUITE combines system control, data
collection and data analysis in one user friendly
interface. Comprehensive profile, 3D and roughness
analyses conforming even to the latest DIN ISO
25187 are included. The Software can handle up to
100 million data points and takes advantage of the
powerful Windows 7 64-bit platform.
An outstanding feature is the ASCAN Software.
No programming skills are required to create even
complex programs in a few minutes:
t Automation of measurement routines
t Easy programming using tasks and templates
t Offset and fiducial correction using
t pattern recognition
t Built-in SPC Charts with reporting function
t Flexible, user defined data output format
t Barcode or user field input
t Step & Repeat function

Technology

t Chromatic confocal sensors
t Resolution down to 3 nm,
t measurement range up to 10 mm
t Lateral resolution 1 μm
t x-/y - stage with magnetic linear drives
t 200 mm travel in x- and y-direction

SLOGAN

BECAUSE ACCURACY MATTERS