MEMS Inertial Sensors Selection Tables0 pages

MEMS Inertial Sensors
Accelerometers

iSensor ® MEMS Accelerometer Subsystems

MEMS Accelerometers

Part Number

Output
Type

Range (g)

±1.7, ±18 
ADXL103
±35, ±50, ±70 
ADXL78
±70, ±250, ±500 
ADXL001
±1.7, ±5, ±18 
ADXL203
±5 
ADXL206
±35, ±50, ±70 
ADXL278
±3 
ADXL335
±16 
ADXL326
±3 
ADXL337
±5 
ADXL325
±2 
ADXL327
±200
ADXL377 New
±1, ±2, ±4, ±8
ADXL350 New
±1.5, ±3, ±6, ±12 
ADXL312
±2, ±4, ±8, ±16 
ADXL345
±2, ±4, ±8
ADXL362 New
±2, ±4, ±8, ±16 
ADXL346
±1.2
ADXL213
±2 
ADXL212
Digital Accelerometers
ADIS16003
1.7
ADIS16006
5
Inclinometers
ADIS16203
±1.7 ; ±180°
±1.7; ±180°
ADIS16209
±1.7; ±90°
ADIS16201
±1.7; ±180°
ADIS16210
Impact Sensors
ADIS16204
±70
±19
ADIS16240
Vibration Sensors

Sensing
Axes

BW Typ
(kHz)

Sensitivity

Noise
(mg/√Hz )

Voltage
Supply (V)

Supply Current (mA)

Temperature
Range (°C)

Package

Analog
Analog
Analog
Analog
Analog
Analog
Analog
Analog
Analog
Analog
Analog
Analog
Digital
Digital
Digital
Digital
Digital
PWM
PWM

1
1
1
2
2
2
3
3
3
3
3
3
3
3
3
3
3
2
2

2.5
0.4
22
2.5
2.5
0.4
1.6
1.6
1.6
1.6
1.6
1.6
1.6
1.6
1.6
0.2
1.6
2.5
0.5

100 mV/g to 1000 mV/g
27 mV/g to 55 mV/g
2.2 mV/g to 16 mV/g
100 mV/g to 1000 mV/g
312 mV/g
27 mV/g to 55 mV/g
300 mV/g
57 mV/g
300 mV/g
174 mV/g
440 mV/g
6.5 mV/g
2 mg/LSB
2.9 mg/LSB
3.9 mg/LSB
1 mg/LSB
3.9 mg/LSB
30%/g
12.5 %/g

0.11
1.1
3.3
0.11
0.11
1.1
0.15
0.3
0.175
0.25
0.25
2.4
0.25
0.34
0.52
0.18
0.34
0.16
0.5

3.0 to 6.0
4.75 to 5.25
3.135 to 6
3.0 to 6.0
4.75 to 5.25
4.75 to 5.25
1.8 to 3.6
1.8 to 3.6
1.8 to 3.6
1.8 to 3.6
1.8 to 3.6
1.8 to 3.6
2.0 to 3.6
2.0 to 3.6
2.0 to 3.6
1.6 to 3.5
1.7 to 2.75
3.0 to 6.0
3.0 to 5.25

0.7
2.2
2.5
0.7
0.7
2.2
0.35
0.35
0.3
0.35
0.35
0.3
0.45 to 0.166
0.17
0.03 to 0.14
0.002
0.03 to 0.14
0.7
0.7

–40 to +125
–40 to +105
–40 to +125
–40 to +125
–40 to +175
–40 to +105
–40 to +85
–40 to +85
–40 to +85
–40 to +85
–40 to +85
–40 to +85
–40 to +85
–40 to +105
–40 to +85
–40 to +85
–40 to +85
–40 to +85
–40 to +85

5 mm × 5 mm × 2 mm LCC
5 mm × 5 mm × 2 mm LCC
5 mm × 5 mm × 2 mm LCC
5 mm × 5 mm × 2 mm LCC
13 mm × 8 mm × 2 mm SBDIP
5 mm × 5 mm × 2 mm LCC
4 mm × 4 mm × 1.45 mm LFCSP
4 mm × 4 mm × 1.45 mm LFCSP
3 mm × 3 mm × 1.45 mm LFCSP
4 mm × 4 mm × 1.45 mm LFCSP
4 mm × 4 mm × 1.45 mm LFCSP
3 mm × 3 mm × 1.45 mm LFCSP
3 mm × 4 mm × 1.2 mm LGA
5 mm × 5 mm × 1.45 mm LFCSP
3 mm × 5 mm × 1 mm LGA
3 mm × 3.25 mm × 1.06 mm LGA
3 mm × 3 mm × 1 mm LGA
5 mm × 5 mm × 2 mm LCC
5 mm × 5 mm × 2 mm LCC

SPI
SPI

2
2

5.5
2.2

—
—

0.11
0.2

5
5

1.5
1.5

–40 to +125
–40 to +125

7 mm × 7 mm LGA
7 mm × 7 mm LGA

Digital
Digital
Digital
Digital

1
2
2
3

2.25
0.05
2.25
0.05

0.025°/LSB
0.025°/LSB
0.1°/LSB
—

—
0.19
—
—

3.3
3.3
3.3
3.3

11 (normal); 0.5 (sleep)
11 (normal); 0.14 (sleep)
11 (normal); 0.5 (sleep)
18 (normal); 0.23 (sleep)

–40 to +125
–40 to +125
–40 to +125
–40 to +125

9 mm × 9 mm LGA
9 mm × 9 mm LGA
9 mm × 9 mm LGA
15 mm × 24 mm × 15 mm module

Digital
Digital

2
3

0.4
1.6

8.407 mg/LSB
51.4 mg/LSB

1.8
0.48

3.3
3

12 (normal); 0.15 (sleep)
1 (normal); 0.1 (sleep)

–40 to +105
–40 to +85

9 mm × 9 mm LGA
12 mm × 12 mm BGA

ADIS16228 New

±18

Digital

3

5

0.3052 mg/LSB

0.248

3.3

40 (normal); 0.23 (sleep)

–40 to +125

15 mm × 24 mm × 15 mm module

ADIS16223
ADIS16227

±70
±70

Digital
Digital

3
3

22
22

4.768 mg/LSB
1.192 mg/LSB

3.3
3.3

3.3
3.3

43 (normal); 0.23 (sleep)
43 (normal); 0.23 (sleep)

–40 to +125
–40 to +125

15 mm × 15 mm × 15 mm module
15 mm × 15 mm × 15 mm module

Additional Features
Low noise, low tempco
Ultrawide bandwidth
Low noise, low tempco
Ultrahigh temperature

3-axis, high-g
Min/max tempco, low power, FIFO
Low power, FIFO
Ultralow power, deep FIFO, built in multiple sample activity/inactivity detection, external sync
Low power, FIFO
Low noise, low offset tempco, PWM output
Low noise, low offset tempco, PWM output
Internal temperature sensor
Internal temperature sensor
Vertical mount, tilt and acceleration outputs, programmable alarms, digital filtering
Dual-mode, high accuracy (0.1°) tilt and acceleration outputs, programmable alarms, digital filtering
Tilt and acceleration outputs, programmable alarms, digital filtering
Tri-axis, single command frame alignment, programmable alarms, serial number and device ID
Programmable event recorder, peak sample/hold
Programmable event recorder, peak sample/hold
Embedded FFT analysis, low noise, multiple capture modes, programmable windowing/filtering,
serial number and device ID
Embedded FFT analysis

Gyroscopes (continues on next page)
Part Number
ADXRS644

Range
(°/sec)

Output
Type

300

Analog

BW Typ In-Run Bias
(Hz)
Stability (°/Hr)
1000

9

Angle Random
Walk (°/√Hr )

Linear
Acceleration
Effect(°/sec/g)

Sensitivity

Bias
Tempco
(°/sec/°C)

Sensitivity
Tempco
(ppm/°C)

NonLinearity
(% FS)

Voltage
Supply (V)

Supply
Current
(mA)

Start-Up
Time (ms)

Temperature
Range (°C)

Package

0.6

0.015

9 mV/°/sec

—

—

0.1

6

3.5

50

–40 to +105

7 mm × 7 mm × 3 mm BGA

MEMS Gyroscopes (All Single Axis)

ADXRS646

300

Analog

1000

12

0.6

0.015

9 mV/°/sec

—

—

0.1

6

3.5

50

–40 to +105

7 mm × 7 mm × 3 mm BGA

ADXRS642
ADXRS624
ADXRS623
ADXRS622
ADXRS652
ADXRS620

250
50
150
250
250
300

Analog
Analog
Analog
Analog
Analog
Analog

2000
1000
3000
2500
2500
2500

20
60
60
60
60
60

1.2
2
2
2
2
2

0.03
0.1
0.1
0.1
0.1
0.1

7 mV/°/sec
25 mV/°/sec
12.5 mV/°/sec
7 mV/°/sec
7 mV/°/sec
6 mV/°/sec

0.02
0.07
0.14
0.10
0.10
0.11

308
462
462
308
308
308

0.01
0.1
0.1
0.1
0.1
0.1

4.75 to 5.25
4.75 to 5.25
4.75 to 5.25
4.75 to 5.25
4.75 to 5.25
4.75 to 5.25

3.5
3.5
3.5
3.5
3.5
3.5

50
50
50
50
50
50

–40 to +105
–40 to +105
–40 to +105
–40 to +105
–40 to +105
–40 to +105

7 mm × 7 mm × 3 mm BGA
7 mm × 7 mm × 3 mm BGA
7 mm × 7 mm × 3 mm BGA
7 mm × 7 mm × 3 mm BGA
7 mm × 7 mm × 3 mm BGA
7 mm × 7 mm × 3 mm BGA

20,000+ Analog

ADXRS649

2000

200

15

0.03

0.01 mV/°/sec

—

—

0.1

5

3.5

3

–40 to +105

ADXRS453

300

Digital

77.5

16

0.9

0.01

0.0125°/LSB

0.0034

207

0.05

3.15 to 5.25

6

100

–40 to +105

ADXRS450

300

Digital

80

25

0.9

0.03

0.0125°/LSB

0.02

462

0.05

3.15 to 5.25

6

100

–40 to +105

For more information on ADI MEMS inertial sensors, visit our website at www.analog.com/MEMS.

7 mm × 7 mm × 3 mm BGA
9 mm × 9 mm × 4 mm LCC VMP,
10 mm × 10 mm × 3.5 mm SOIC
9 mm × 9 mm × 4 mm LCC VMP,
10 mm × 10 mm × 3.5 mm SOIC

Additional Features
Vibration immune, min/max specs across temperature range,
ultralow noise
Ultrahigh stability, vibration immune, min/max specs across
temperature range, ultralow noise
High vibration immunity, industrial grade typ specs
Min/max specs across temperature range
Min/max specs across temperature range
Min/max specs across temperature range
Industrial grade typ specs
Min/max specs across temperature range
High rotation rate up to 50,000°/sec, industrial grade
typ specs
Calibrated over temperature, vibration immune, in-plane and
out-of-plane sensing
High vibration immunity, industrial grade typ specs, in-plane
and out-of-plane sensing