FRT MicroSpy® Profile0 pages

MicroSpy® Profile
The MicroSpy® Profile is an optical profilometer that offers cost-efficient
access to contact-free 2D- and 3D-surface metrology.
Users in development and production inspect various surfaces, from
smooth to very rough, from matte to glossy, or even transparent, with this
FRT surface metrology device. Even strongly absorting surfaces can be
measured fast and reliably, since the device uses the chromatic distance
measurement and is equipped with a brilliant long-living, and energyefficient LED. For the chromatic measurement sensors from the FRT CWL
sensor family are used. Various sensors with different measuring range are
available, so that the device can be perfectly optimized for the actual measuring task.

MEASURING TASKS
Roughness
Step Height
Film Thickness
Weart
Defect Inspectiont 3D Map
Flatness
Waviness
Surface Structure
Profiles
...

SYSTEM CHARACTERISTICS

Integrated CCD-camera with add-on illumination
Brilliant, long-living, and energy-efficient LED
Manual sensor approach with high-precision axis
Control and measurement computer with TFT monitor
Simple and efficient control with FRT Acquire software
User-friendly FRT Mark III evaluation software with numerous evaluation
and display options according to DIN-ISO and SEMI standards
Backside metallization of a solar cell

BENEFITS

Attractive price-performance ratio
Highly sophisticated hard- and software
Professional quality assurance based on precise optical metrology
High performance and economical measuring tool
Durable, minimal servicing and low maintenance
Intuitive handling with fast evaluation of results
Application specific consulting and service from skilled FRT experts

3D topography of a MEMS structure

the art of metrologyTM